
Wafer detection

Area
Semiconductor front end processes
Duty
Presence inspection, Positioning
Business sectors
Electronics
HRTU 420 ultrasonic scanner

- Sensors in cubical plastic housing in degree of protection IP 67
- Different opening angles and sound cone geometries
- Switching behavior largely independent of surface properties
- Precise switching point adjustment
HRTR 3B-XL scanner with background suppression

- Especially for the detection of objects with openings, bore holes and grooves, e.g. circuit boards
- Also for transparent foils and bottles
- HRTR 3B-L: especially for the use of fluorescent lamps with HF ballasts
HRTR 2 scanner with background suppression

- Miniature diffuse reflection light scanners with visible red light
- Homogeneous light beam with very small laser-like light spot
- Very good background suppression
HRTR 3B-V scanner with background suppression

- With V-optics: especially for the reliable detection of flat, reflective or highly polished surfaces
- Even for transparent objects
PRKL 3B polarized retro-reflective photoelectric sensor

- Reliable detection of objects with a diameter ≥ 0.1 mm
- Object detection through slits, holes and gaps with extremely small dimensions
- Especially designed for the detection of fast events and small parts